|
Diameter |
150.25±0.2mm |
 |
|
Thickness |
350±25μm |
|
| Resistivity | 0.015~0.025ohm·cm | |
| Micro-pipe Density | ≤0.5ea/cm2 | |
|
LTV |
≤3μm(5mm*5mm) | |
| TTV | ≤5μm | |
| Bow |
-15~15μm |
|
| Warp | ≤20μm |
|
|
Roughness |
≤0.2nm（5μm*5μm） |
Research & Dummy Grade is also available.
Please consult to your sales.