|
Diameter |
150.25±0.2mm |
 |
|
Thickness |
500±25μm |
|
|
Primary flat orientation |
[1-100]±5° or Notch |
|
|
Resistivity |
≥1E8ohm·cm |
|
|
Micro-pipe Density |
≤0.5ea/cm2 |
|
|
LTV |
≤3μm(5mm*5mm) |
|
|
TTV |
≤5μm |
|
|
Bow |
-15μm~15μm |
|
|
Warp |
≤20μm |
|
|
Roughness |
≤0.2nm（5μm*5μm） |
Research & Dummy Grade is also available.
Please consult to your sales.